In eastern China's Hefei City of Anhui Province, there is Nexchip Semiconductor. It is one of the leading wafer foundries in the country. Recently it completed building the first double-layered clean room in China.
In Nextchip's Fab III, L20 and L40 production workshop smooth supply and discharge with space efficiency.
L30 and L50, the double-layer clean room workshop, can accommodate about 300 overhead hoist transfers (OHTs).
Their 17-kilometer aerial track can reach a total production of 200,000 pieces.
The independent air system, wind pressure control, and high-efficiency filter purification are in line with the 100-class clean room standard.
In the double-layer clean room, the intelligent transmission system and the automated control system work together.
The OHTs shuttle through manufacturing areas such as photo, etching, thin film, and diffusion in the two floors, repeating thousands of times and going through more than 600 processes.
With the same production capacity of 100,000 pieces, the double-layer floor design reduces the transmission distance between blocks by 30% compared to a single-layer floor.
The double-layer clean room not only makes manufacturing more intelligent but also reduces costs in land, construction, mechanical and electrical facility, and equipment.
It is a milestone for wafer foundries in China.
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