China’s software startup YWO successfully develops OPC software for computational lithography Yuwei Optical, a software startup, has successfully developed an independent computational lithography OPC software, and it is now being tested and verified, JW Insights reported on November 21. 2.8w 11-23 18:24 READ MOST 我国授权纳米专利总数达46.4万件 居世界第一 9304 08-30 21:46 POPULAR TAGS 纳米 中科院 专利